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ISO 14644-6:2007 EN/FR
Cleanrooms and associated controlled environments — Part 6: Vocabulary
废止
发布日期 :
2007-07-04
实施日期 :
ISO 14644-3:2005 EN
Cleanrooms and associated controlled environments — Part 3: Test methods
废止
发布日期 :
2005-12-06
实施日期 :
ISO 14644-5:2004 EN
Cleanrooms and associated controlled environments — Part 5: Operations
现行
发布日期 :
2004-08-13
实施日期 :
ISO 14644-4:2001 EN
Cleanrooms and associated controlled environments — Part 4: Design, construction and start-up
废止
发布日期 :
2001-04-12
实施日期 :
ISO 14644-1:1999 EN
Cleanrooms and associated controlled environments — Part 1: Classification of air cleanliness
废止
发布日期 :
1999-05-06
实施日期 :