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- ISO/TR 14644-21:2023 EN 45b61e24
【国际标准】 Cleanrooms and associated controlled environments — Part 21: Airborne particle sampling techniques
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标准简介
适用范围:
暂无
标准号:
ISO/TR 14644-21:2023 EN
标准名称:
Cleanrooms and associated controlled environments — Part 21: Airborne particle sampling techniques
英文名称:
Cleanrooms and associated controlled environments — Part 21: Airborne particle sampling techniques标准状态:
现行-
发布日期:
2023-08-18 -
实施日期:
出版语种:
EN
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- 国家标准计划
- ISO 14644-18:2023 EN bd821383 Cleanrooms and associated controlled environments — Part 18: Assessment of suitability of consumables
- ISO/TR 14644-21:2023 EN 45b61e24 Cleanrooms and associated controlled environments — Part 21: Airborne particle sampling techniques
- ISO 14644-4:2022 EN 044b0d34 Cleanrooms and associated controlled environments — Part 4: Design, construction and start-up
- ISO 14644-8:2022 EN c79c49d1 Cleanrooms and associated controlled environments — Part 8: Assessment of air cleanliness by chemical concentration (ACC)
- ISO 14644-9:2022 EN 45eeef72 Cleanrooms and associated controlled environments — Part 9: Assessment of surface cleanliness for particle concentration
- ISO 14644-10:2022 EN 24e88730 Cleanrooms and associated controlled environments — Part 10: Assessment of surface cleanliness for chemical contamination
- ISO 14644-17:2021 EN 438098d9 Cleanrooms and associated controlled environments — Part 17: Particle deposition rate applications
- ISO 14644-3:2019 EN 5c347ef0 Cleanrooms and associated controlled environments — Part 3: Test methods
- ISO 14644-16:2019 EN fb22fbde Cleanrooms and associated controlled environments — Part 16: Energy efficiency in cleanrooms and separative devices
- ISO 14644-12:2018 EN e213b6dd Cleanrooms and associated controlled environments — Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration
- ISO 14644-15:2017 EN 111743a6 Cleanrooms and associated controlled environments — Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration
- ISO 14644-13:2017 EN 23fd3eec Cleanrooms and associated controlled environments — Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications
- ISO 14644-14:2016 EN 79930d1f Cleanrooms and associated controlled environments — Part 14: Assessment of suitability for use of equipment by airborne particle concentration
- ISO 14644-1:2015 EN b423fa95 Cleanrooms and associated controlled environments — Part 1: Classification of air cleanliness by particle concentration
- ISO 14644-2:2015 EN 88b59d1b Cleanrooms and associated controlled environments — Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration