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【国际标准】 Semiconductor devices - Micro-electromechanical devices - Part 42: Measurement methods of electro-mechanical conversion characteristics of piezoelectric MEMS cantilever
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2026-01-09
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标准简介适用范围：
暂无
标准号：
IEC 62047-42:2022 EN
标准名称：
Semiconductor devices - Micro-electromechanical devices - Part 42: Measurement methods of electro-mechanical conversion characteristics of piezoelectric MEMS cantilever
英文名称：
Semiconductor devices - Micro-electromechanical devices - Part 42: Measurement methods of electro-mechanical conversion characteristics of piezoelectric MEMS cantilever标准状态：
现行-
发布日期：
2022-09-16 -
实施日期：
出版语种：
EN
- 其它标准
- 上一篇： IEC 62047-41:2021 EN-FR c8a1893b Semiconductor devices - Micro-electromechanical devices - Part 41: RF MEMS circulators and isolators
- 下一篇： IEC 62047-43:2024 EN 7ed4f3fa Semiconductor devices - Micro-electromechanical devices - Part 43: Test method of electrical characteristics after cyclic bending deformation for flexible micro-electromechanical devices
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